PLASMA CLEANING APPARATUS

PLASMA CLEANING APPARATUS

The invention relates to a plasma cleaning apparatus comprising a container defining an ionisation chamber provided with an opening, a shielding container shielding the container defining the ionisation chamber provided with an opening, wherein the openings of the container defining the ionisation c...

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Hauptverfasser: ZOESTBERGEN, Edzo, COMMANDEUR, Colin, WESTERWAAL, Ruud Johannes, BOUWENS, Antonius Johannes Petrus, BOELSMA, Christiaan
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator ZOESTBERGEN, Edzo
COMMANDEUR, Colin
WESTERWAAL, Ruud Johannes
BOUWENS, Antonius Johannes Petrus
BOELSMA, Christiaan
description The invention relates to a plasma cleaning apparatus comprising a container defining an ionisation chamber provided with an opening, a shielding container shielding the container defining the ionisation chamber provided with an opening, wherein the openings of the container defining the ionisation chamber and the opening of the shielding container are in register, a gas supply, a power supply, a plurality of magnets, wherein the plurality of magnets are placed inside the ionisation chamber.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title PLASMA CLEANING APPARATUS
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