PLASMA CLEANING APPARATUS

PLASMA CLEANING APPARATUS

The invention relates to a plasma cleaning apparatus comprising a container defining an ionisation chamber provided with an opening, a shielding container shielding the container defining the ionisation chamber provided with an opening, wherein the openings of the container defining the ionisation c...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZOESTBERGEN, Edzo, COMMANDEUR, Colin, WESTERWAAL, Ruud Johannes, BOUWENS, Antonius Johannes Petrus, BOELSMA, Christiaan
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:The invention relates to a plasma cleaning apparatus comprising a container defining an ionisation chamber provided with an opening, a shielding container shielding the container defining the ionisation chamber provided with an opening, wherein the openings of the container defining the ionisation chamber and the opening of the shielding container are in register, a gas supply, a power supply, a plurality of magnets, wherein the plurality of magnets are placed inside the ionisation chamber.