TARGET AND METHOD FOR PRODUCING A TARGET

The invention relates to a target for physical vapor deposition, comprising the following chemical composition: 95 mol% to 100 mol% of a mixture of at least two of the following compounds: titanium boride (TiB2) and/or vanadium boride (VB2) and/or mixed phases ((Ti,V)B2) of titanium boride (TiB2) an...

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Bibliographische Detailangaben
Hauptverfasser:	POLCIK, Peter, WOERLE, Sabine
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	The invention relates to a target for physical vapor deposition, comprising the following chemical composition: 95 mol% to 100 mol% of a mixture of at least two of the following compounds: titanium boride (TiB2) and/or vanadium boride (VB2) and/or mixed phases ((Ti,V)B2) of titanium boride (TiB2) and vanadium boride (VB2); 0.01 mol% to 5 mol% of carbon (C); less than 0.01 mol% of other borides than titanium boride (TiB2) and/or vanadium boride (VB2) and/or mixed phases ((Ti,V)B2) of titanium boride (TiB2) and vanadium boride (VB2), wherein, in relation to the metallic purity, the sum of the mixture of titanium boride (TiB2) and/or vanadium boride (VB2) and/or mixed phases ((Ti,V)B2) of titanium boride (TiB2) and vanadium boride (VB2) and the carbon (C) is at least 99.8 mol%, and comprising the following physical properties: a density greater than 90%, preferably greater than 95% of the theoretic density of the chemical composition defined above; and an average particle size of particles of the mixture of titanium boride (TiB2) and/or vanadium boride (VB2) and/or mixed phases ((Ti,V)B2) of titanium boride (TiB2) and vanadium boride (VB2) of less than 10 micrometres, preferably less than 3 micrometres.