ACOUSTIC MICRO IMAGING DEVICE HAVING AT LEAST FIRST AND SECOND BALANCED LINEAR MOTOR ASSEMBLIES
A scanning acoustic microscope (10) comprises first and second balanced linear motor assemblies (36), each of which drives a linear rotor (104,106) carrying an ultrasonic transducer (94,96). A mass of the first ultrasonic transducer (94) and the first rotor (104) is generally equal to a mass of the...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A scanning acoustic microscope (10) comprises first and second balanced linear motor assemblies (36), each of which drives a linear rotor (104,106) carrying an ultrasonic transducer (94,96). A mass of the first ultrasonic transducer (94) and the first rotor (104) is generally equal to a mass of the second ultrasonic transducer (96) and the second rotor (106). The first and second rotors (104,106) are moved in opposite directions along generally parallel paths, thereby balancing the forces that are generated when the transducers (94,96) are accelerated or decelerated. |
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