PROTECTION OF SURFACES IN PLASMA PROCESSING METHODS

A method for manufacturing a coated item resistant to plasma corrosion and a related coated item (100) are provided. The method enables deposition of a triple coating for protecting items used in plasma processing equipment, such as plasma-enhanced chemical vapor deposition (PECVD) apparatuses or pl...

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Bibliographische Detailangaben
Hauptverfasser:	KOSTAMO, Juhana, PUDAS, Marko
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A method for manufacturing a coated item resistant to plasma corrosion and a related coated item (100) are provided. The method enables deposition of a triple coating for protecting items used in plasma processing equipment, such as plasma-enhanced chemical vapor deposition (PECVD) apparatuses or plasma etchers.