MEMS SOUND TRANSDUCER ELEMENT

MEMS SOUND TRANSDUCER ELEMENT

The present disclosure is concerned with a MEMS sound transducer element (100) operable in an audio and an ultrasonic range. The MEMS sound transducer element (100), inter alia, comprises a first electrode structure (101), wherein a conductive material of the first electrode structure (101) comprise...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BRETTHAUER, Christian, ANZINGER, Sebastian, FUELDNER, Marc
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
ELECTRICITY
FOR PERFORMING MECHANICAL WORK IN GENERAL
GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY
PERFORMING OPERATIONS
TRANSPORTING
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Beschreibung
Zusammenfassung:The present disclosure is concerned with a MEMS sound transducer element (100) operable in an audio and an ultrasonic range. The MEMS sound transducer element (100), inter alia, comprises a first electrode structure (101), wherein a conductive material of the first electrode structure (101) comprises a plurality of electrically isolated electrode segments (111, 112), and a second electrode structure (102) spaced apart from the first electrode structure (101), wherein the first electrode structure (101) and the second electrode structure (102) are operable as an audio sound transducer. A first subset (11) of the plurality of electrically isolated electrode segments (111, 112) of the first electrode structure (101) is, in conjunction with the second electrode structure (102), operable as an ultrasonic or audio emitter, and a second subset (12) of the plurality of the electrically isolated electrode segments (111, 112) of the first electrode structure (101) is, in conjunction with the second electrode structure (102), operable as an ultrasonic or audio receiver.