COMPACT OR MINIATURE HIGH TEMPERATURE DIFFERENTIAL PRESSURE SENSOR CAPSULE

A differential pressure sensor (30) comprising a header (32) with a first end, a second end, and a side wall and an interior cavity with a central hole extending from the second end to the interior cavity; a first isolator plate (34) with a central hole attached to the first end of the header (32); a first isolator diaphragm (36) attached to the first isolator plate; a second isolator plate (40) with a central hole attached to the second end of the header; a second isolator diaphragm (42) attached to the second isolator plate (40); a polymer chamber (48) positioned in the interior cavity of the header (32); a polymer spacer (46) with a central hole over the polymer chamber (48); a sensor stack in the interior cavity in the header (32) comprising: a MEMS pressure sensor (10) positioned within the polytherimid chamber (48) the MEMS pressure sensor (10) comprising a silicon diaphragm (D) with a top surface and a bottom surface attached to a silicon backup wafer (14) with a central hole; a first pedestal (50) with a central hole; and a second pedestal (52) with a central hole attached to a bottom of the interior cavity in the header; wherein the central holes of the second isolator plate (40), the header (32), the second pedestal (52), the first pedestal (50), and the silicon backup wafer (14) are aligned such that the bottom surface of the silicon diaphragm (D) has a direct line of sight and is fluidly connected to the second isolator diaphragm (42) and wherein the central holes of the polymer spacer (46) and the first isolator plate (34) are aligned such that the top surface of the diaphragm (D) has a direct line of sight and is fluidly connected to the first isolator diaphragm (36); and sensor elements on the diaphragm (D) configured to provide, via sensor circuitry, connected to the sensor to provide an indication of deflection of the diaphragm (D) due to pressure differences between the first and second pressures (P1, P2) applied to the first and second isolator diaphragms (36, 42) respectively, wherein electrical connections and fill fluid connections to the differential pressure sensor (30) are made through radial connections in the wall of the header (32).