THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREFOR, ARRAY SUBSTRATE, AND ELECTRONIC DEVICE

A thin film transistor, a manufacturing method thereof, an array substrate and an electronic device are disclosed. The manufacturing method of the thin film transistor includes: forming an active layer pattern (1030) on a base substrate (101); forming a gate insulating layer (104) on the active laye...

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Bibliographische Detailangaben
Hauptverfasser:	LIU, Liangliang, TANG, Liang, BAI, Nini
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A thin film transistor, a manufacturing method thereof, an array substrate and an electronic device are disclosed. The manufacturing method of the thin film transistor includes: forming an active layer pattern (1030) on a base substrate (101); forming a gate insulating layer (104) on the active layer pattern (1030); the gate insulating layer (104) includes a first portion (1041), a second portion (1042) and a third portion (1043), the third portion (1043) is on both sides of the first portion (1041), the second portion (1042) is between the first portion (1041) and the third portion (1043) on at least one side, and the thickness of the second portion (1042) is larger than that of the third portion (1043).