CLEANING APPARATUS AND CLEANING METHOD

Cleaning apparatus (10) for cleaning a workpiece (3), including a cleaning chamber (19) having a first side wall and a second side wall, a cleaning station (97) including a cleaning axis, a cleaning nozzle, a first clamping device (51) arranged on the first side wall, a second clamping device (151)...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAWAMORI, Yoshiteru, MITSUE, Toyoaki
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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