CLEANING APPARATUS AND CLEANING METHOD

Cleaning apparatus (10) for cleaning a workpiece (3), including a cleaning chamber (19) having a first side wall and a second side wall, a cleaning station (97) including a cleaning axis, a cleaning nozzle, a first clamping device (51) arranged on the first side wall, a second clamping device (151)...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAWAMORI, Yoshiteru, MITSUE, Toyoaki
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:Cleaning apparatus (10) for cleaning a workpiece (3), including a cleaning chamber (19) having a first side wall and a second side wall, a cleaning station (97) including a cleaning axis, a cleaning nozzle, a first clamping device (51) arranged on the first side wall, a second clamping device (151) arranged on the second side wall, and a drying station (95) including a drying axis (121), a drying nozzle (85b), a second clamping device (151) arranged on the second side wall, and a turn table (87) having two regions arranged in a 180 degree rotational symmetry. The turn table (87) arranges one of the two regions is arranged in the cleaning station (97), and the other in the drying station (95).