METHOD OF AND APPARATUS FOR MONITORING A FOCUS STATE OF A MICROSCOPE

METHOD OF AND APPARATUS FOR MONITORING A FOCUS STATE OF A MICROSCOPE

For monitoring a focus state of a microscope (1), an auxiliary light beam (13) is coupled into the microscope (1) in such a way that the auxiliary light beam (13) is inclined at an angle with regard to a normal to an object plane (5) of the microscope (1) and that the auxiliary light beam (13) runs...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Willemer, Winfried, Fischer, Joachim, Henrich, Matthias
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Beschreibung
Zusammenfassung:For monitoring a focus state of a microscope (1), an auxiliary light beam (13) is coupled into the microscope (1) in such a way that the auxiliary light beam (13) is inclined at an angle with regard to a normal to an object plane (5) of the microscope (1) and that the auxiliary light beam (13) runs within a plane (20) which is spanned outside of a main imaging area (17) of the microscope (1) by a straight line (19) running in the object plane (5) and the normal to the object plane (5). Position changes of an area of incidence (25) of a part (15) of the coupled auxiliary light beam (13) reflected by a reference boundary surface on a registration device (16) are registered.