PLASMA PROCESSING MACHINE

A practical plasma processing machine is provided, in which attachment mechanism 50 is provided for attaching plasma head 14 to attachment section 52 of a head moving device that moves the plasma head. Since the plasma head can be attached or detached, for example, it is easy to exchange it with a d...

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Bibliographische Detailangaben
Hauptverfasser:	IKEDO, Toshiyuki, JINDO, Takahiro
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Beschreibung
Zusammenfassung:	A practical plasma processing machine is provided, in which attachment mechanism 50 is provided for attaching plasma head 14 to attachment section 52 of a head moving device that moves the plasma head. Since the plasma head can be attached or detached, for example, it is easy to exchange it with a different type of plasma head, remove for maintenance, attaching after maintenance, or the like.