OXYGEN PERMEABLE ELEMENT AND SPUTTERING TARGET MATERIAL

An oxygen permeable element (10) includes an anode (13), a cathode (12), and a solid electrolyte (11). With a voltage applied between the anode (13) and the cathode (12), oxygen gas in the cathode side atmosphere is allowed to pass through the solid electrolyte (11) to the anode side. The oxygen per...

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Bibliographische Detailangaben
Hauptverfasser: IDE, Shingo, OYAMA, Tokiharu, SHIRO, Yusuke
Format: Patent
Sprache:eng ; fre ; ger
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