OXYGEN PERMEABLE ELEMENT AND SPUTTERING TARGET MATERIAL

An oxygen permeable element (10) includes an anode (13), a cathode (12), and a solid electrolyte (11). With a voltage applied between the anode (13) and the cathode (12), oxygen gas in the cathode side atmosphere is allowed to pass through the solid electrolyte (11) to the anode side. The oxygen per...

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Hauptverfasser: IDE, Shingo, OYAMA, Tokiharu, SHIRO, Yusuke
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:An oxygen permeable element (10) includes an anode (13), a cathode (12), and a solid electrolyte (11). With a voltage applied between the anode (13) and the cathode (12), oxygen gas in the cathode side atmosphere is allowed to pass through the solid electrolyte (11) to the anode side. The oxygen permeable element (10) has interlayers (15, 16) located between the solid electrolyte (11) and at least one of the cathode (12) and the anode (13), at least one interlayer (15,16) containing an oxide of bismuth. The solid electrolyte (11) contains an oxide of lanthanum.