POWDER FOR COATING AN ETCH CHAMBER

A powder of melted particles, more than 95% by number of the particles exhibiting a circularity of greater than or equal to 0.85. The powder including more than 99.8% of a rare earth metal oxide and/or of hafnium oxide and/or of an aluminum oxide, as percentage by mass based on the oxides. The powde...

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Bibliographische Detailangaben
Hauptverfasser:	ALLIMANT, Alain, WALLAR, Howard
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM,CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THERARE-EARTH METALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY LIME, MAGNESIA METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	A powder of melted particles, more than 95% by number of the particles exhibiting a circularity of greater than or equal to 0.85. The powder including more than 99.8% of a rare earth metal oxide and/or of hafnium oxide and/or of an aluminum oxide, as percentage by mass based on the oxides. The powder has a median particle size D50 of less than 15 μm, a 90 percentile of the particle sizes, D90, of less than 30 μm, and a size dispersion index (D90−D10)/D10 of less than 2, and a relative density of greater than 90%. The Dn percentiles of the powder are the particle sizes corresponding to the percentages, by number, of n %, on the cumulative distribution curve of the size of the particles in the powder and the particle sizes are classified by increasing order.