VACUUM PUMP SYSTEM

VACUUM PUMP SYSTEM

A vacuum pump system having at least two chambers which are arranged in series. A turbomolecular pump is connected to the second or final chamber, and a multistage Roots pump is connected to the first chamber, wherein the outlet of the first chamber is connected to an intermediate inlet of the multi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: SCHNEIDERS, Robert
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
BLASTING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
HEATING
LIGHTING
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Beschreibung
Zusammenfassung:A vacuum pump system having at least two chambers which are arranged in series. A turbomolecular pump is connected to the second or final chamber, and a multistage Roots pump is connected to the first chamber, wherein the outlet of the first chamber is connected to an intermediate inlet of the multistage vacuum pump, and an outlet of the turbomolecular pump is connected to a main inlet of the multistage vacuum pump.