ADJUSTING DEVICE FOR PRESSURE DETECTOR

An adjusting device for a pressure detector that is capable of arbitrarily adjusting the initial position of a membrane member is provided. An adjusting device for a pressure detector S includes a control unit E that sequentially executes a first step in which a predetermined adjusting pressure is g...

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Bibliographische Detailangaben
Hauptverfasser: HASEGAWA Shinya, EDA Yuki, MAKI Hideto
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:An adjusting device for a pressure detector that is capable of arbitrarily adjusting the initial position of a membrane member is provided. An adjusting device for a pressure detector S includes a control unit E that sequentially executes a first step in which a predetermined adjusting pressure is generated in a first zone K1 by activating a pump D with the first zone K1 being closed by the closing of an electromagnetic valve B, and a second step in which a gas-phase portion S2, the first zone K1, and a second zone K2 are combined into a closed space by disabling the closing of the electromagnetic valve B; and an adjusting-pressure-acquiring unit N that acquires the adjusting pressure to be generated in the first step, the adjusting pressure being acquired in accordance with a relationship between a pressure and a capacity of the first zone K1 in the first step and a pressure and a capacity of the combination of the gas-phase portion S2, the first zone K1, and the second zone K2 in the second step. The control unit E brings the membrane member M to a position corresponding to the adjusting pressure by executing the second step after activating the pump D in the first step in such a manner as to generate the adjusting pressure acquired by the adjusting-pressure-acquiring unit N.