PRESSURE MEASURING DEVICE

PRESSURE MEASURING DEVICE

Disclosed is a pressure measuring device, whose pressure sensor is protected against thermomechanical stresses, comprising a carrier, a support body arranged on the carrier, a pressure sensor arranged on the support body, a first joint including a joint material connecting the support body with the...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: MÜLLER, Dennis, SIXTENSSON, Daniel, ZIERMANN, Rene
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
TESTING
TRANSPORTING
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Beschreibung
Zusammenfassung:Disclosed is a pressure measuring device, whose pressure sensor is protected against thermomechanical stresses, comprising a carrier, a support body arranged on the carrier, a pressure sensor arranged on the support body, a first joint including a joint material connecting the support body with the pressure sensor, and a second joint including a joint material connecting the support body with the carrier. The support body has on a face opposite the pressure sensor a first groove configured such that the first groove surrounds a joint area of the support body. The joint area of the support body and a footprint of the first joint are essentially equally large and significantly less than a base area of the pressure sensor opposite the first joint.