METHOD FOR PRODUCING OSCILLATOR SUBSTRATE AND OSCILLATOR SUBSTRATE

Provided is method for producing an oscillator substrate in which an oscillating section (17a) of an oscillating membrane (17) facing an oscillation space (15) is configured to oscillate in a direction normal to the membrane surface of the oscillating membrane (17), including: forming a sacrifice la...

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Bibliographische Detailangaben
1. Verfasser:	ABE, Shuya
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRONIC CIRCUITRY DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS PUBLIC ADDRESS SYSTEMS RESONATORS
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Beschreibung
Zusammenfassung:	Provided is method for producing an oscillator substrate in which an oscillating section (17a) of an oscillating membrane (17) facing an oscillation space (15) is configured to oscillate in a direction normal to the membrane surface of the oscillating membrane (17), including: forming a sacrifice layer within a region over a substrate (10) intended to become the oscillation space (15), sacrifice layer being formed of same material as the substrate (10); forming the oscillating membrane (17) over the sacrifice layer; forming a sacrifice layer removing hole (12) in the substrate (10) in a manner to lead to the sacrifice layer from a surface of the substrate (10) opposite to the sacrifice layer; forming an etching protective film (13) over an internal wall surface of the sacrifice layer removing hole (12); and removing the sacrifice layer by etching through the sacrifice layer removing hole (12) to form the oscillation space (15).