MEMS DEVICE AND METHOD FOR PRODUCING THE SAME

A MEMS device comprises a first electrode structure and a second electrode structure forming a capacitive sensing arrangement. The MEMS device comprises a plurality of anti-stiction bumps arranged between the first electrode structure and the second electrode structure at a corresponding plurality o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WALTHER, Arnaud, FUELDNER, Marc
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
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