MEMS DEVICE AND METHOD FOR PRODUCING THE SAME

MEMS DEVICE AND METHOD FOR PRODUCING THE SAME

A MEMS device comprises a first electrode structure and a second electrode structure forming a capacitive sensing arrangement. The MEMS device comprises a plurality of anti-stiction bumps arranged between the first electrode structure and the second electrode structure at a corresponding plurality o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WALTHER, Arnaud, FUELDNER, Marc
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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Beschreibung
Zusammenfassung:A MEMS device comprises a first electrode structure and a second electrode structure forming a capacitive sensing arrangement. The MEMS device comprises a plurality of anti-stiction bumps arranged between the first electrode structure and the second electrode structure at a corresponding plurality of locations. The plurality of locations being projected into a main surface of the second electrode structure is distributed so as to comprise a first distribution density in a first main surface region of the main surface and so as to comprise second, different distribution density in a second main surface region of the main surface, the second main surface region being delimited from the first main surface region.