FLOW SENSOR

FLOW SENSOR

Reliable flow sensor (100) including a sense resistor (130) and a refractory resistor (140) and with enclosures (110, 410) that have predictable thermal variations and reduced mechanical tolerances for a more consistent fluid flow and more consistent flow measurements. Thermal variations can be made...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Van Sprakelaar, Gertjan, Abed, Omar, Gaynor, Justin
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TESTING
TRANSPORTING
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Beschreibung
Zusammenfassung:Reliable flow sensor (100) including a sense resistor (130) and a refractory resistor (140) and with enclosures (110, 410) that have predictable thermal variations and reduced mechanical tolerances for a more consistent fluid flow and more consistent flow measurements. Thermal variations can be made predictable by using etched structures such as channels (420) in silicon blocks (110, 410). Mechanical tolerances can be reduced using lithography and high-precision semiconductor manufacturing equipment and techniques.