CERAMIC, PROBE-GUIDING PART, PROBE CARD AND SOCKET FOR INSPECTING PACKAGE

A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at -50 to 500°C of 1.0×10-6to 5.0×10-6/°C, is excellent in low electrostatic properties (106to 1014Ω·cm in volume...

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Bibliographische Detailangaben
Hauptverfasser:	MORI, Kazumasa, YAMAGISHI, Wataru, ETO, Shunichi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE LIME, MAGNESIA MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES METALLURGY PHYSICS REFRACTORIES SLAG TESTING TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at -50 to 500°C of 1.0×10-6to 5.0×10-6/°C, is excellent in low electrostatic properties (106to 1014Ω·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.