POLYMERIC FOAM LAYER AND METHODS OF MAKING THE SAME

Polymeric foam layer comprising a star polymer, wherein the polymeric foam layer has a thickness up to 25,700 micrometers, and methods of making the same. Exemplary uses of polymeric foam layers described herein including a finishing pad for silicon wafers and vibration damping.

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Bibliographische Detailangaben
Hauptverfasser: KALISH, Jeffrey P, MEREE, Caitlin E
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:Polymeric foam layer comprising a star polymer, wherein the polymeric foam layer has a thickness up to 25,700 micrometers, and methods of making the same. Exemplary uses of polymeric foam layers described herein including a finishing pad for silicon wafers and vibration damping.