POLYMERIC FOAM LAYER AND METHODS OF MAKING THE SAME
Polymeric foam layer comprising a star polymer, wherein the polymeric foam layer has a thickness up to 25,700 micrometers, and methods of making the same. Exemplary uses of polymeric foam layers described herein including a finishing pad for silicon wafers and vibration damping.
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Polymeric foam layer comprising a star polymer, wherein the polymeric foam layer has a thickness up to 25,700 micrometers, and methods of making the same. Exemplary uses of polymeric foam layers described herein including a finishing pad for silicon wafers and vibration damping. |
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