INSPECTING METHOD AND INSPECTION SYSTEM

Our method is for testing an analysis apparatus that performs analysis using light that has passed through a probe attached to a pipe through which a first fluid that is an object of analysis flows, the probe being attached in such a manner that a portion of a light path passes outside a housing of...

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Bibliographische Detailangaben
Hauptverfasser: MATSUNO Gen, SAKUMA Kaori, MURATA Akihiro, TANAKA Hideko, HIDAKA Yoshihisa, TAKEZAWA Shigeru, OHARA Toshiki
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Our method is for testing an analysis apparatus that performs analysis using light that has passed through a probe attached to a pipe through which a first fluid that is an object of analysis flows, the probe being attached in such a manner that a portion of a light path passes outside a housing of the probe and is disposed inside the pipe. The method includes a first process of introducing a third fluid inside the housing of the probe in a state such that a second fluid that absorbs less of the light than the first fluid has been introduced into the pipe, the third fluid having known absorption characteristics, and a second process of analyzing absorption characteristics of the third fluid using the light that has passed through the probe.