DOPANT ENHANCED SOLAR CELL AND METHOD OF MANUFACTURING THEREOF

The present invention relates to a dopant enhanced silicon based solar cell and method of manufacturing thereof. The solar cell includes on a surface of the silicon substrate a layer stack including a thin oxide layer and a polysilicon layer, the thin oxide layer being arranged as a tunnel oxide layer in-between the surface of the substrate and the polysilicon layer. The solar cell is provided with fire-through metal contacts arranged on the layer stack locally penetrating into the polysilicon layer. The silicon substrate is provided at the side of the surface with a dopant species that creates a dopant profile of a first conductivity type in the silicon substrate. The dopant profile in the silicon substrate has a maximal dopant level between about 1×10+18 and about 3×10+19 atoms/cm3 and a depth of at least 200 nm within the substrate to a dopant atom level of 1×10+17 atoms/cm3.