RESONANCE DEVICE

A resonance device that is capable of maintaining a vacuum in a vibration space and inhibit the height of a product from increasing is provided.A resonator includes a lower electrode, an upper electrode, and a piezoelectric film that is formed between the lower electrode and the upper electrode. A M...

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Bibliographische Detailangaben
Hauptverfasser:	KAMOTO, Taku, OKAWA, Tadayuki, UMEDA, Keiichi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION OF NOISE BY SUCH CIRCUITS GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING,BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN ANON-SWITCHING MANNER IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS RESONATORS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A resonance device that is capable of maintaining a vacuum in a vibration space and inhibit the height of a product from increasing is provided.A resonator includes a lower electrode, an upper electrode, and a piezoelectric film that is formed between the lower electrode and the upper electrode. A MEMS device includes an upper lid that faces the upper electrode of the resonator, and a lower lid that faces the lower electrode of the resonator and that seals the resonator together with the upper lid. A CMOS device is mounted on a surface of the upper lid or the lower lid opposite a surface that faces the resonator. The CMOS device includes a CMOS layer and a protective layer that is disposed on a surface of the CMOS layer opposite a surface that faces the resonator. The upper lid or the lower lid to which the CMOS device is joined includes a through-electrode that electrically connects the CMOS device and the resonator to each other.