SIMULTANEOUS DOUBLE-SIDED COATING OF A MULTILAYER GRAPHENE PELLICLE BY LOCAL THERMAL PROCESSING

A method of manufacturing a pellicle for a lithographic apparatus, the method including locally heating the pellicle using radiative heating, and depositing coating material simultaneously on both sides of the pellicle, and pellicles manufactured according to this method. Also disclosed is the use o...

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Bibliographische Detailangaben
Hauptverfasser:	VLES, David, Ferdinand, NASALEVICH, Maxim, Aleksandrovich, NOTENBOOM, Arnoud, Willem, GIESBERS, Adrianus, Johannes, Maria, PÉTER, Mária, VAN ZWOL, Pieter-Jan, KURGANOVA, Evgenia, VOORTHUIJZEN, Willem-Pieter
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A method of manufacturing a pellicle for a lithographic apparatus, the method including locally heating the pellicle using radiative heating, and depositing coating material simultaneously on both sides of the pellicle, and pellicles manufactured according to this method. Also disclosed is the use of a multilayer graphene pellicle with a double-sided hexagonal boron nitride coating in a lithographic apparatus.