APPARATUS AND METHOD FOR MULTI-DIE INTERCONNECTION

A semiconductor and a method of fabricating the semiconductor having multiple, interconnected die including: providing a semiconductor substrate having a plurality of disparate die formed within the semiconductor substrate, and a plurality of scribe lines formed between pairs of adjacent die of the...

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Bibliographische Detailangaben
Hauptverfasser: FRICKER, Jean-philippe, FEROLITO, Philip
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A semiconductor and a method of fabricating the semiconductor having multiple, interconnected die including: providing a semiconductor substrate having a plurality of disparate die formed within the semiconductor substrate, and a plurality of scribe lines formed between pairs of adjacent die of the plurality of disparate die; and fabricating, by a lithography system, a plurality of inter-die connections that extend between adjacent pair of die of the plurality of die.