CALIBRATION STANDARD AND METHOD FOR THE PRODUCTION THEREOF

The invention relates to a calibration standard (1) for calibrating a stylus measuring instrument or an optical measuring instrument, comprising a carrier substrate (2) and a first calibration structure (3) applied to the carrier substrate (2), the first calibration structure (3) having a first topography (4), which is designed in such a way and is arranged on the carrier substrate (2) in such a way that the first topography enables a calibration of a first metrological property of the measuring instrument. The aim of the invention is to provide a calibration standard (1) and a method for producing a calibration standard (1) that enable a complete calibration of measuring instruments by means of a single calibration standard (1). This aim is achieved, according to the invention, in that the calibration standard (1) also has at least one second calibration structure (3) applied to the carrier substrate (2), the second calibration structure (3) having a second topography (4), which is designed in such a way and is arranged on the carrier substrate (2) in such a way that the second topography enables a calibration of a second metrological property of the measuring instrument, the first topography (4) and the second topography (4) being different from each other.