METHOD FOR DETERMINING A TEMPERATURE USING AN INFRARED SENSOR

To provide a method for calculating the temperature of, for example, a vacuum pump, especially a turbo molecular pump, by using an IR sensor system.SOLUTION: The method includes: measuring a first temperature Tobs,1 at a measurement position; generating a reference temperature Tref in a reference po...

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Bibliographische Detailangaben
Hauptverfasser:	Wissner, Jürgen, Wirth, Adrian, Schnarr, Johannes
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BLASTING COLORIMETRY HEATING LIGHTING MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS PHYSICS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS RADIATION PYROMETRY TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR WEAPONS
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Beschreibung
Zusammenfassung:	To provide a method for calculating the temperature of, for example, a vacuum pump, especially a turbo molecular pump, by using an IR sensor system.SOLUTION: The method includes: measuring a first temperature Tobs,1 at a measurement position; generating a reference temperature Tref in a reference position by a heat source; measuring a second temperature Tobs,2 in the reference position; comparing the second temperature Tobs,2 with an expected temperature Texp generated from the reference temperature Tref; and correcting the first temperature Tobs,1 on the basis of a deviation when the second temperature Tobs,2 deviates from the expected temperature Texp.SELECTED DRAWING: Figure 1