ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREFOR, FLAT PANEL DETECTOR, AND IMAGING DEVICE

ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREFOR, FLAT PANEL DETECTOR, AND IMAGING DEVICE

An array substrate is disclosed, which includes a base substrate, a low-temperature polysilicon thin film transistor disposed on the base substrate, and a photoelectric converter connected with a first electrode of the thin film transistor. The first electrode includes a first conductive layer, the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHU, Xiaohui, GAO, Jianjian, GUO, Haibo, JIANG, Huigang
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:An array substrate is disclosed, which includes a base substrate, a low-temperature polysilicon thin film transistor disposed on the base substrate, and a photoelectric converter connected with a first electrode of the thin film transistor. The first electrode includes a first conductive layer, the photoelectric converter is disposed on a side of the first conductive layer facing away from the base substrate, and the first conductive layer includes a material resistant to etching in a process of forming the photoelectric converter. The first electrode is a source electrode or a drain electrode of the thin film transistor. Also disclosed are a method of manufacturing the array substrate, a flat panel detector including the array substrate, and an image apparatus including the flat panel detector.