VACUUM APPARATUS AND RECOVERY SUPPORT METHOD

A vacuum apparatus (1) equipped with an automatic transport mechanism (4) for transporting a specimen and a sensor (11) for detecting a state of the vacuum apparatus (1) includes: a determining unit which determines whether or not a recoverable error has occurred based on a signal from the sensor (1...

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Bibliographische Detailangaben
1. Verfasser:	TSUKAMOTO, Kazunori
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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Beschreibung
Zusammenfassung:	A vacuum apparatus (1) equipped with an automatic transport mechanism (4) for transporting a specimen and a sensor (11) for detecting a state of the vacuum apparatus (1) includes: a determining unit which determines whether or not a recoverable error has occurred based on a signal from the sensor (11); and a display control unit (102) which causes, when it is determined that a recoverable error has occurred, a display unit (130) to display (102) procedure of a recovery operation in a wizard format, wherein the display control unit determines whether or not the recovery operation has been performed according to the procedure displayed on the display unit (130) based on a signal from the sensor (11), and causes the display unit (130) to display next procedure of the recovery operation when it is determined that the recovery operation has been performed according to the procedure.