SEMICONDUCTOR WIRE BONDING MACHINE CLEANING DEVICE AND METHOD

A methodology and medium for regular and predictable cleaning the support hardware such as capillary tube in semiconductor assembly equipment components, while it is still in manual, semi-automated, and automated assembly are disclosed. The cleaning material may include a cleaning pad layer and one...

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Hauptverfasser: HUMPHREY, Bret, A, HUMPHREY, Alan, E, SHIVLAL, Janakraj, SMITH, Wayne, C
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A methodology and medium for regular and predictable cleaning the support hardware such as capillary tube in semiconductor assembly equipment components, while it is still in manual, semi-automated, and automated assembly are disclosed. The cleaning material may include a cleaning pad layer and one or more intermediate layers that have predetermined characteristics.