POWER CONVERTER UNIT, PLASMA PROCESSING EQUIPMENT AND METHOD OF CONTROLLING SEVERAL PLASMA PROCESSES

Power converter unit (1,1') capable to convert an electrical input power into a bipolar output power and to deliver this output power to at least two independent plasma processing chambers (9a, 9b .. 9n), the unit (1,1') comprising: - one power input port (2) for connection to an electrica...

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Bibliographische Detailangaben
Hauptverfasser:	RUDA, Krzysztof, ENGELSTAEDTER, Jan Peter, OZIMEK, Pawel, SWIATNICKI, Jakub
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC,OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWERSUPPLY SYSTEMS BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONTROL OR REGULATION THEREOF CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUTPOWER CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GENERATION INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Power converter unit (1,1') capable to convert an electrical input power into a bipolar output power and to deliver this output power to at least two independent plasma processing chambers (9a, 9b .. 9n), the unit (1,1') comprising: - one power input port (2) for connection to an electrical power delivering grid (7), - at least two, preferably more than two, power output ports (3a, 3b, .. 3n) each for connection to one of the plasma process chambers (9a, 9b, ... 9n), - a control device (4) configured to control the unit (1,1') to deliver the bipolar output power to the power output ports (3a, 3b, .. 3n), using control parameters of at least one of: power, voltage, current, excitation frequency, or threshold for protective measures, such that at least one of the control parameters at a first power output port (3a) is different from the corresponding control parameter at a different power output port (3b, ... 3n).