METHOD FOR PRODUCING A VACUUM PUMP

To improve the resistance of adhesive connections in a vacuum pump.SOLUTION: The present invention relates to a method of producing a vacuum pump (111), in particular a turbo molecular pump. With the method, first elements (163, 165) are connected to a second element (161) by an adhesive. In this ca...

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Bibliographische Detailangaben
1. Verfasser:	Koci, Bernd
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE ADHESIVES BLASTING CHEMISTRY DYES HEATING LIGHTING MECHANICAL ENGINEERING METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL NON-POSITIVE DISPLACEMENT PUMPS PAINTS POLISHES POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS USE OF MATERIALS AS ADHESIVES WEAPONS
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Beschreibung
Zusammenfassung:	To improve the resistance of adhesive connections in a vacuum pump.SOLUTION: The present invention relates to a method of producing a vacuum pump (111), in particular a turbo molecular pump. With the method, first elements (163, 165) are connected to a second element (161) by an adhesive. In this case, the first and second elements (163, 165, 161) each have first or second adhesive regions (231, 232, 233, 234) provided for an adhesive, and then at least one of the adhesive regions (231, 232, 233, 234) is at least partially treated with plasma before connection.SELECTED DRAWING: Figure 1