ADSORPTIVE TEMPORARY FIXING SHEET AND METHOD FOR MANUFACTURING SAME

Provided is an adsorption temporary fixing sheet having a sufficient shear adhesive strength in a direction parallel to its surface, and having a weak adhesive strength in a direction vertical to the surface. Also provided is a method of producing such adsorption temporary fixing sheet. The adsorpti...

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Bibliographische Detailangaben
Hauptverfasser: TOKUYAMA, Hideyuki, KATO, Kazumichi, ISEKI, Toru, KANADA, Mitsuhiro
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Provided is an adsorption temporary fixing sheet having a sufficient shear adhesive strength in a direction parallel to its surface, and having a weak adhesive strength in a direction vertical to the surface. Also provided is a method of producing such adsorption temporary fixing sheet. The adsorption temporary fixing sheet of the present invention includes a foam layer including an open-cell structure, wherein, when a silicon chip vertical adhesive strength of a surface of the foam layer after 20 hours at -40°C is represented by V1 (N/1 cm□), a silicon chip vertical adhesive strength thereof after 20 hours at 23°C is represented by V2 (N/1 cm□), and a silicon chip vertical adhesive strength thereof after 20 hours at 125°C is represented by V3 (N/1 cm□), and a silicon chip shearing adhesive strength of the surface of the foam layer after 20 hours at -40°C is represented by H1 (N/1 cm□) , a silicon chip shearing adhesive strength thereof after 20 hours at 23°C is represented by H2 (N/1 cm□), and a silicon chip shearing adhesive strength thereof after 20 hours at 125°C is represented by H3 (N/1 cm□), relationships of V1