DEVICE MADE OF ALKALINE NIOBATE COMPRISING A BARRIER LAYER AND METHOD FOR MANUFACTURING SAME

A piezoelectric device includes at least one upper layer of piezoelectric material based on alkali metal niobate and one lower layer of metal located above a substrate, wherein it comprises a barrier layer of material that is a barrier to the diffusion of alkali metals into the metal and that is ine...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RODRIGUEZ, Guillaume, MOULIN, Cécile, HALIMAOUI, Aomar
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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