DEVICE MADE OF ALKALINE NIOBATE COMPRISING A BARRIER LAYER AND METHOD FOR MANUFACTURING SAME

DEVICE MADE OF ALKALINE NIOBATE COMPRISING A BARRIER LAYER AND METHOD FOR MANUFACTURING SAME

A piezoelectric device includes at least one upper layer of piezoelectric material based on alkali metal niobate and one lower layer of metal located above a substrate, wherein it comprises a barrier layer of material that is a barrier to the diffusion of alkali metals into the metal and that is ine...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RODRIGUEZ, Guillaume, MOULIN, Cécile, HALIMAOUI, Aomar
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
ELECTRICITY
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Beschreibung
Zusammenfassung:A piezoelectric device includes at least one upper layer of piezoelectric material based on alkali metal niobate and one lower layer of metal located above a substrate, wherein it comprises a barrier layer of material that is a barrier to the diffusion of alkali metals into the metal and that is inert to the alkali metals of the niobite, the barrier material layer being located between the lower layer of metal and the upper layer of piezoelectric material. A process for producing the device is also provided.