SUBSTRATE POSITIONING DEVICE WITH REMOTE TEMPERATURE SENSOR

The invention relates to a stage apparatus, the stage apparatus 400 comprising:- an object table 410 configured to hold an object 420;- a positioning device 430 configured to position the object table and the object held by the object table;- a remote temperature sensor 450 configured to measure a t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	VAN DER TOORN, Jan-Gerard, Cornelis, BRUURS, Patriek, Adrianus, Alphonsus, Maria, VAN BANNING, Dennis, Herman, Caspar, KADIJK, Edwin, Cornelis
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS SEMICONDUCTOR DEVICES TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	The invention relates to a stage apparatus, the stage apparatus 400 comprising:- an object table 410 configured to hold an object 420;- a positioning device 430 configured to position the object table and the object held by the object table;- a remote temperature sensor 450 configured to measure a temperature of the object table and/or the object.