ELECTRON MICROSCOPE WITH IMPROVED IMAGING RESOLUTION

An Electron Microscope M comprising:- A specimen holder H, for holding a specimen S;- A source 4, for producing a beam B of electrons;- An illumination system 6, for directing said beam so as to irradiate the specimen;- An elongate beam conduit B", through which the beam is directed;- A detecto...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Dona, Pleun, Henstra, Alexander
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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