ELECTRON MICROSCOPE WITH IMPROVED IMAGING RESOLUTION

An Electron Microscope M comprising:- A specimen holder H, for holding a specimen S;- A source 4, for producing a beam B of electrons;- An illumination system 6, for directing said beam so as to irradiate the specimen;- An elongate beam conduit B", through which the beam is directed;- A detecto...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Dona, Pleun, Henstra, Alexander
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:An Electron Microscope M comprising:- A specimen holder H, for holding a specimen S;- A source 4, for producing a beam B of electrons;- An illumination system 6, for directing said beam so as to irradiate the specimen;- An elongate beam conduit B", through which the beam is directed;- A detector 26, 30, 32, 34, for detecting radiation emanating from the specimen in response to said irradiation,wherein at least a longitudinal portion of said beam conduit has a composite structure comprising:- An outer tube 50 of electrically insulating material;- An inner skin 52 of electrically conductive material.In an alternative but related structure, at least a longitudinal portion of said beam conduit is comprised of an aggregate composite material comprising intermixed electrically insulating material and electrically conductive material.