OXIDE SEMICONDUCTOR AND SEMICONDUCTOR DEVICE
Provided are an oxide semiconductor excellent in transparency, mobility, and weatherability, etc., and a semiconductor device having the oxide semiconductor, a p-type semiconductor being realizable in the oxide semiconductor. The oxide semiconductor consists of a composite oxide, which has a crystal...
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Zusammenfassung: | Provided are an oxide semiconductor excellent in transparency, mobility, and weatherability, etc., and a semiconductor device having the oxide semiconductor, a p-type semiconductor being realizable in the oxide semiconductor. The oxide semiconductor consists of a composite oxide, which has a crystal structure including a foordite structure and contains Nb and Sn elements, and its holes become charge carriers by the condition that Sn4+/ (Sn2++ Sn4+) which is a ratio of Sn4+to a total amount of Sn in the composite oxide is 0.006 ≤ Sn4+/ (Sn2++ Sn4+) ≤ 0.013. |
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