PHYSICAL QUANTITY MEASURING DEVICE

A sensor module (2) comprising: a ceramic module body (20) comprising: a diaphragm (21) displaceable b a pressure of a fluid to be measured introduced into the sensor module; and a cylindrical portion (22) integral with a periphery of the diaphragm (21); detector (23) provided on a flat surface (21A...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MIDORIKAWA, Yusuke, YAMASHITA, Naoki, YAMAGISHI, Nobutaka, TOHYAMA, Shuji
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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