PHYSICAL QUANTITY MEASURING DEVICE

A sensor module (2) comprising: a ceramic module body (20) comprising: a diaphragm (21) displaceable b a pressure of a fluid to be measured introduced into the sensor module; and a cylindrical portion (22) integral with a periphery of the diaphragm (21); detector (23) provided on a flat surface (21A...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MIDORIKAWA, Yusuke, YAMASHITA, Naoki, YAMAGISHI, Nobutaka, TOHYAMA, Shuji
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A sensor module (2) comprising: a ceramic module body (20) comprising: a diaphragm (21) displaceable b a pressure of a fluid to be measured introduced into the sensor module; and a cylindrical portion (22) integral with a periphery of the diaphragm (21); detector (23) provided on a flat surface (21A) of the diaphragm (21) opposite to a surface of the diaphragm (21) that is to be in contact with the fluid to be measured, the detector (23) detecting a displacement of the diaphragm (21); a pad (24) provided on a flat surface (22B) of the cylindrical portion (22) radially outwardly adjacent to the flat surface (21A of the diaphragm (21); and an electronic component (25) provided on the flat surface (22B) of the cylindrical portion (22) and electrically connected to the detector (23) and the pad (24), wherein the electronic component (25) is provided opposite to the pad (24) with respect to the flat surface (21A) of the diaphragm (21), and at least one positioning outer groove (20A) is provided on an outer periphery of the cylindrical portion (22) in parallel with an axial direction of the cylindrical portion (22).