MANUFACTURING DEVICE CONTROL BASED ON METROLOGY DATA

A method includes receiving topic names (121) from a metrology interface device (120), where the topic names (121) correspond to data generated by metrology devices (102, 104, 502) associated with a manufacturing operation. The method also includes accessing a data stream (131) from the metrology in...

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Bibliographische Detailangaben
Hauptverfasser: DOYLE, Joseph, SIVICH, Lorrie, FOROUHAR, Farshad, PODNAR, Gregg W, GRUBE, Robert W, RULE, Carrie, ZAYIC, Jerry D
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A method includes receiving topic names (121) from a metrology interface device (120), where the topic names (121) correspond to data generated by metrology devices (102, 104, 502) associated with a manufacturing operation. The method also includes accessing a data stream (131) from the metrology interface device (120). The data stream (131) includes converted metrology data (123, 123A, 123B, 125, 523) (in a common format) from the metrology devices (102, 104, 502) and corresponding topic names (121). The method further includes extracting first converted metrology data (123, 123A, 123B, 125, 523) from the data stream (131) based on a first topic name (133, 135) of the topic names (121). The first converted metrology data (123, 123A, 123, 125, 523) is generated by converting first metrology data (103, 103A, 103B, 105, 503) from a first metrology device (102, 104, 502) of the metrology devices (102, 104, 502) to the first converted metrology data (123, 123A, 123B, 125, 523) having the common format. The method also includes comparing the first converted metrology data (123, 123A, 123B, 125, 523) to a specification, detecting a condition based on the comparison, and sending a command (155, 165) to a manufacturing device (162, 166) based on the condition.