CU-GA ALLOY SPUTTERING TARGET AND METHOD FOR PRODUCING CU-GA ALLOY SPUTTERING TARGET

A Cu-Ga alloy sputtering target having a composition including, as a metal component, Ga in a range of 20 at% or more and 45 at% or less, K and Na in a range of 0.1 at% or more and 2 at% or less in total, and a Cu balance including inevitable impurities, in which, complex fluorides containing Na, K,...

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Bibliographische Detailangaben
Hauptverfasser:	HASHIMOTO Shu, TAKEDA Takuma, UMEMOTO Keita, MORI Satoru
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ALLOYS BASIC ELECTRIC ELEMENTS CASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FERROUS OR NON-FERROUS ALLOYS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MAKING METALLIC POWDER MANUFACTURE OF ARTICLES FROM METALLIC POWDER METALLURGY PERFORMING OPERATIONS POWDER METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING TREATMENT OF ALLOYS OR NON-FERROUS METALS WORKING METALLIC POWDER
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Beschreibung
Zusammenfassung:	A Cu-Ga alloy sputtering target having a composition including, as a metal component, Ga in a range of 20 at% or more and 45 at% or less, K and Na in a range of 0.1 at% or more and 2 at% or less in total, and a Cu balance including inevitable impurities, in which, complex fluorides containing Na, K, and F are dispersed in a matrix of a Cu-Ga alloy, a maximum diameter of an inscribed circle of the complex fluorides is 30 µm or less, and [Na]/([Na]+[K]) is set to be in a range of 0.3 or more and 0.9 or less, [Na] and [K] being atomic ratios of Na and K in the complex fluorides, respectively.