TRANSPORT RING

A device for transporting a substrate includes a ring-shaped body at least partially surrounding a ring opening. The ring-shaped body includes a first section protruding radially outwards in relation to the ring opening and a second section protruding radially inwards. The first and second sections each have heat transfer properties that determine an axial heat transfer through the sections with an axial temperature difference in relation to a normal of the surface of the ring opening. At least one of the heat transfer properties of the first and second sections is different from one another such that the heat flowing through a unit area element in the axial direction is lower in the first section than in the second section. The heat transfer property refers to the specific heat conductivity or the emissivity of at least one surface of the first and second sections pointing in the axial direction,