GAS ANALYZER AND GAS ANALYZING DEVICE

The present disclosure relates to a gas analyzer for measuring density and/or viscosity of a medium. The gas analyzer includes a connection panel having first and second media openings, each of which extends from a first surface to a second surface of the connection panel. A sensor panel is joined t...

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Bibliographische Detailangaben
Hauptverfasser:	REITH, Patrick, BADARLIS, Anastasios, HUBER, Christof
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	The present disclosure relates to a gas analyzer for measuring density and/or viscosity of a medium. The gas analyzer includes a connection panel having first and second media openings, each of which extends from a first surface to a second surface of the connection panel. A sensor panel is joined together with the connection panel on a first joint plane, and a cover panel is joined together with the sensor panel on a second joint plane, on a sensor panel face facing away from the connection panel. The cover panel has a cover panel cavity which communicates with the first and second media openings, and the sensor panel has at least one oscillator cavity which communicates with the first and second media openings. The sensor panel has a micromechanical oscillator arranged in the oscillator cavity and excitable to mechanically vibrate perpendicularly to the joint planes.