PIEZOELECTRIC ACOUSTIC MEMS TRANSDUCER AND FABRICATION METHOD THEREOF

A piezoelectric MEMS transducer (20), formed in a body (21) of semiconductor material, has a central axis (S) and a peripheral area (30A), and comprises a plurality of beams (39), transverse to the central axis, each beam having a first end (41), coupled to the peripheral area of the body, and a sec...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VERCESI, Federico, CERINI, Fabrizio, ADORNO, Silvia
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS TRANSPORTING
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